Products
- Product Introduction
Northglasshorizontal architectural coating machines mainly produce Low-E coated glass, solar-control glass, AR film, etc. by using magnetron sputtering method depositing different kinds of material on the substrate.
Technical Feature:
The identical 795mm design of vacuum compartments enables users to exchange the location of the pump,gas separation and cathode compartments freely, thus to improve process flexibility.
New design of the gas separation device avoids gas drifting between cathode compartments and achieves better gas separation effect.
The extruded aluminum supportingtube makes the magnet andits yoke isolate from the cooling water toavoid the change of the magnetic field due to soaking in the water for a long time.
Equipped with 5-9 manifoldauxiliary process gas system and each could be different as the process requirement.
High precision conveying control can be ensured by servo motors.
Reducingthe volume of enter and exit chambers toimprove efficiency and cutdown cost.
An integrated cathode lid achievesa perfect combination by putting gas manifold, controllers, connections for power supply and various media in a “box” to make the process configuration more flexible.
Every cathode is equipped with an independent control system.
The one-piece lid design can makethe mechanical and hydraulic lifting easily, thus to achieve betterautomatic control.
By using of advanced maglev turbo-molecular pumps and screw line pumps to preventpollution from the backflow oil and makes it more reliable and efficient.
Technical Data
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SE2540H series |
SE3300Hseries |
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Substrate type |
float glass, tempered glass, laminated glass, etc. |
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Substrate size |
Max. 2540×3660mm (customizable) |
Max. 3300×6000mm (customizable）
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Substrate thickness |
3-19mm（customizable） |
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Cycle time |
> 20s |
>30s |
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Ultimate pressure |
< 2E-6mbar |
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Up time |
>95% |
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Film uniformity |
≤±1.0% |
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